A GUIDE TO HANDSON MEMS DESIGN AND PROTOTYPING

Opis produktu

Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California Santa Cruz. Prior to this he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester New York. He has led a sixcompany industrial research consortium under the National Institute of Standards and Technologys Advanced Technology Program (ATP) to develop a new process for optical MEMS and he has over 80 patents.Get the handson experience needed to design fabricate and test MEMS devices with this practical guide for students and professionals.Get the handson experience needed to design fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multiproject fabrication processes for lowcost MEMS projects and endofchapter exercises and design challenges are provided making this ideally suited for use in the classroom and by practising engineers.Get the handson experience needed to design fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multiproject fabrication processes for lowcost MEMS projects and endofchapter exercises and design challenges are provided making this ideally suited for use in the classroom and by practising engineers.Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design this practical guide provides the handson experience needed to design fabricate and test MEMS devices. You will learn how to use foundry multiproject fabrication processes for lowcost MEMS projects as well as computeraided design tools (layout modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed from fields including micromechanics electrostatics optical MEMS thermal MEMS and fluidic MEMS. Theres also a final chapter on packaging and testing MEMS devices as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.1. Introduction: 2. Micromechanics: 3. Electrostatics: 4. Optical MEMS: 5. Thermal MEMS: 6. Fluidic MEMS: 7. Package and test: 8. From prototype to product: MEMS deformable mirrors for adaptive optics.

Data Publikacji: 2011-08-25
Wymiary: 228 mm 152 mm 14 mm 400 gr