ELECTROCHEMICAL MICROMACHINING FOR NANOFABRICATION MEMS AND NANOTECHNOLOGY

Opis produktu

Electrochemical Micromachining for Nanofabrication MEMS and Nanotechnology/ is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals techniques processes and conditions continuing with indepth discussions of mechanisms of material removal including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to constructionrelated features of EMM setup suitable for industrial micromachining applications varying types of EMM and the latest developments in the improvement of EMM setup. Further it covers power supply roll of electrolyte and other major factors influencing EMM processes and reports research findings concerning the improvement of machining accuracy and efficiency. Finally the book devotes a chapter to the design and development of microtools one of the most vital components in EMM. brbrullCovers the generation of micro features used for advanced engineering of materials for fabrication of MEMS microsystems and other microengineering applications/llExplores the trend of decreasing size of fabricated devices reflected in coverage of generation of highprecision nanofeatures on metal and semiconductors utilizing SPM STM and AFM and nanotechnology aspects of EMM/llDescribes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)/l/ulThis book is an excellent addition to the nanotechnology literatureThe book will be very useful to professionals as well as nonprofessionals who are interested in electrochemical micromachining. I strongly recommend this book for scientists engineers and those who wish to teach this subject. bMRS Bulletin Electrochemical Micromachining for Nanofabrication MEMS and Nanotechnology//bWritten by a worldrenowned expert this first book solely dedicated to electrochemical micromachining (EMM) focuses on applications in the semiconductor industry and on future directions of increasingly important EMM technology

Data Publikacji: 2015-04-17
Wymiary: 235 mm 191 mm